Towards Grating Reconstruction in Coherent Fourier Scatterometry

N Kumar; S Roy; O El Gawhary; SF Pereira; WMJ Coene; HP Urbach

doi:10.1007/978-3-642-36359-7_109

Towards Grating Reconstruction in Coherent Fourier Scatterometry

N Kumar, S Roy, O El Gawhary, SF Pereira, WMJ Coene, HP Urbach

ImPhys/Optics

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology
Editors	W Osten
Place of Publication	Berlin
Publisher	Springer
Pages	591-594
Number of pages	4
ISBN (Print)	978-3-642-36359-7
DOIs	https://doi.org/10.1007/978-3-642-36359-7_109
Publication status	Published - 2014
Event	7th International Workshop on Advanced Optical Imaging and Metrology, Nürtingen, Germany - Berlin Duration: 8 Sept 2013 → 11 Sept 2013

Publication series

Name
Publisher	Springer

Conference

Conference	7th International Workshop on Advanced Optical Imaging and Metrology, Nürtingen, Germany
Period	8/09/13 → 11/09/13

Keywords

professional journal papers
Conf.proc. > 3 pag

Access to Document

10.1007/978-3-642-36359-7_109

Cite this

@inproceedings{abae880a233646c4b49a5b372995eed8,

title = "Towards Grating Reconstruction in Coherent Fourier Scatterometry",

keywords = "professional journal papers, Conf.proc. > 3 pag",

author = "N Kumar and S Roy and {El Gawhary}, O and SF Pereira and WMJ Coene and HP Urbach",

year = "2014",

doi = "10.1007/978-3-642-36359-7_109",

language = "English",

isbn = "978-3-642-36359-7",

publisher = "Springer",

pages = "591--594",

editor = "W Osten",

booktitle = "Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology",

note = "7th International Workshop on Advanced Optical Imaging and Metrology, N{\"u}rtingen, Germany ; Conference date: 08-09-2013 Through 11-09-2013",

}

Kumar, N, Roy, S, El Gawhary, O , Pereira, SF, Coene, WMJ & Urbach, HP 2014, Towards Grating Reconstruction in Coherent Fourier Scatterometry. in W Osten (ed.), Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology. Springer, Berlin, pp. 591-594, 7th International Workshop on Advanced Optical Imaging and Metrology, Nürtingen, Germany, 8/09/13. https://doi.org/10.1007/978-3-642-36359-7_109

TY - GEN

T1 - Towards Grating Reconstruction in Coherent Fourier Scatterometry

AU - Kumar, N

AU - Roy, S

AU - El Gawhary, O

AU - Pereira, SF

AU - Coene, WMJ

AU - Urbach, HP

PY - 2014

Y1 - 2014

KW - professional journal papers

KW - Conf.proc. > 3 pag

U2 - 10.1007/978-3-642-36359-7_109

DO - 10.1007/978-3-642-36359-7_109

M3 - Conference contribution

SN - 978-3-642-36359-7

SP - 591

EP - 594

BT - Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology

A2 - Osten, W

PB - Springer

CY - Berlin

T2 - 7th International Workshop on Advanced Optical Imaging and Metrology, Nürtingen, Germany

Y2 - 8 September 2013 through 11 September 2013

ER -