Towards Grating Reconstruction in Coherent Fourier Scatterometry

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	7th International Workshop on Advanced Optical Imaging and Metrology
Editors	W Osten
Place of Publication	Berlin Heidelberg
Publisher	Fringe
Pages	591-594
Number of pages	4
ISBN (Print)	978-3-642-36358-0
Publication status	Published - 2013
Event	7th International Workshop on Advanced Optical Imaging and Metrology - Berlin Heidelberg, Nurtingen, Germany Duration: 8 Sept 2013 → 11 Sept 2013

Name
Publisher	Fringe

Conference	7th International Workshop on Advanced Optical Imaging and Metrology
Country/Territory	Germany
City	Nurtingen
Period	8/09/13 → 11/09/13

Keywords

@inproceedings{1ae63dc734f0493bb3eea8cb9c59ac16,

title = "Towards Grating Reconstruction in Coherent Fourier Scatterometry",

keywords = "Conf.proc. > 3 pag",

author = "N Kumar and S Roy and {El Gawhary}, O and SF Pereira and WMJ Coene and HP Urbach",

year = "2013",

language = "English",

isbn = "978-3-642-36358-0",

publisher = "Fringe",

pages = "591--594",

editor = "W Osten",

booktitle = "7th International Workshop on Advanced Optical Imaging and Metrology",

note = "7th International Workshop on Advanced Optical Imaging and Metrology ; Conference date: 08-09-2013 Through 11-09-2013",

}

TY - GEN

T1 - Towards Grating Reconstruction in Coherent Fourier Scatterometry

AU - Kumar, N

AU - Roy, S

AU - El Gawhary, O

AU - Pereira, SF

AU - Coene, WMJ

AU - Urbach, HP

PY - 2013

Y1 - 2013

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-3-642-36358-0

SP - 591

EP - 594

BT - 7th International Workshop on Advanced Optical Imaging and Metrology

A2 - Osten, W

PB - Fringe

CY - Berlin Heidelberg

T2 - 7th International Workshop on Advanced Optical Imaging and Metrology

Y2 - 8 September 2013 through 11 September 2013

ER -