Towards Grating Reconstruction in Coherent Fourier Scatterometry

N Kumar, S Roy, O El Gawhary, SF Pereira, WMJ Coene, HP Urbach

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publication7th International Workshop on Advanced Optical Imaging and Metrology
EditorsW Osten
Place of PublicationBerlin Heidelberg
PublisherFringe
Pages591-594
Number of pages4
ISBN (Print)978-3-642-36358-0
Publication statusPublished - 2013
Event7th International Workshop on Advanced Optical Imaging and Metrology - Berlin Heidelberg, Nurtingen, Germany
Duration: 8 Sep 201311 Sep 2013

Publication series

Name
PublisherFringe

Conference

Conference7th International Workshop on Advanced Optical Imaging and Metrology
CountryGermany
CityNurtingen
Period8/09/1311/09/13

Keywords

  • Conf.proc. > 3 pag

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