Towards interferometry for dimensional drift measurements with nanometer uncertainty

D Voigt, JD Ellis, AL Verlaan, RH Bergmans, JW Spronck, RH Munnig Schmidt

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalMeasurement Science and Technology
Volume22
Issue number9
DOIs
Publication statusPublished - 2011

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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