Responsible Innovation has recently been taken up in public policies and discourses. However, it remains challenging to institutionalise its core dimensions – inclusion, anticipation, responsiveness, reflexivity, and transparency – in practice. De jure standardisation is increasingly seen as an instrument to embed the core principles of Responsible Innovation in innovation processes, because of its anticipatory and inclusive nature. Yet, Responsible Innovation within the standardisation literature is an under-researched field of study. This paper explores and evaluates the relative importance of Responsible Innovation’s core dimensions in the standards development process. We identify eighteen criteria that are deemed essential to the quality of standardisation processes. The Best-Worst Method was used to rank these criteria on their perceived importance. Diversity of participation was found to be the most important contributing factor to the quality of standardisation.