Towards the integration of carbon nanotubes as vias in monolithic three-dimensional integrated circuits

Research output: Contribution to journal › Article › Scientific › peer-review

7 Citations (Scopus)

Original language	English
Pages (from-to)	1-5
Number of pages	5
Journal	Japanese Journal of Applied Physics. Part 1, Regular Papers Brief Communications & Review Papers
Volume	52
Issue number	4S
DOIs	https://doi.org/10.7567/JJAP.52.04CB02
Publication status	Published - 2013

Harvest

Access to Document

@article{50dd8bb158984dcd8be9328bfd41cefc,

title = "Towards the integration of carbon nanotubes as vias in monolithic three-dimensional integrated circuits",

author = "S Vollebregt and AN Chiaramonti and {van der Cingel}, J and CIM Beenakker and R Ishihara",

note = "Harvest",

year = "2013",

doi = "10.7567/JJAP.52.04CB02",

language = "English",

volume = "52",

pages = "1--5",

journal = "Japanese Journal of Applied Physics. Part 1, Regular Papers Brief Communications & Review Papers",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "4S",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Towards the integration of carbon nanotubes as vias in monolithic three-dimensional integrated circuits

AU - Vollebregt, S

AU - Chiaramonti, AN

AU - van der Cingel, J

AU - Beenakker, CIM

AU - Ishihara, R

N1 - Harvest

PY - 2013

Y1 - 2013

U2 - 10.7567/JJAP.52.04CB02

DO - 10.7567/JJAP.52.04CB02

M3 - Article

SN - 0021-4922

VL - 52

SP - 1

EP - 5

JO - Japanese Journal of Applied Physics. Part 1, Regular Papers Brief Communications & Review Papers

JF - Japanese Journal of Applied Physics. Part 1, Regular Papers Brief Communications & Review Papers

IS - 4S

ER -