Towards the integration of carbon nanotubes as vias in monolithic three-dimensional integrated circuits

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalJapanese Journal of Applied Physics. Part 1, Regular Papers Brief Communications & Review Papers
Volume52
Issue number4S
DOIs
Publication statusPublished - 2013

Cite this