Abstract
The unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this perspective, we review recent progress in on-chip 2D material sensors, and compare their performance to the state-of-the-art, with a focus on results achieved in the Graphene Flagship programme. We discuss transfer-based and transfer-free production flows and routes for complementary metal-oxide-semiconductor integration and prototype development. Finally, we give an outlook on the future of 2D material sensors, and sketch a roadmap towards realising their industrial and societal impact.
Original language | English |
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Article number | 023002 |
Number of pages | 11 |
Journal | 2D Materials |
Volume | 12 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2025 |
Keywords
- 2D materials
- sensor
- graphene
- NEMS
- MEMS
- waferscale
- CMOS