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Towards wafer-scale 2D material sensors

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Abstract

The unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this perspective, we review recent progress in on-chip 2D material sensors, and compare their performance to the state-of-the-art, with a focus on results achieved in the Graphene Flagship programme. We discuss transfer-based and transfer-free production flows and routes for complementary metal-oxide-semiconductor integration and prototype development. Finally, we give an outlook on the future of 2D material sensors, and sketch a roadmap towards realising their industrial and societal impact.
Original languageEnglish
Article number023002
Number of pages11
Journal2D Materials
Volume12
Issue number2
DOIs
Publication statusPublished - 2025

Keywords

  • 2D materials
  • sensor
  • graphene
  • NEMS
  • MEMS
  • waferscale
  • CMOS

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