Abstract
The unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this perspective, we review recent progress in on-chip 2D material sensors, and compare their performance to the state-of-the-art, with a focus on results achieved in the Graphene Flagship programme. We discuss transfer-based and transfer-free production flows and routes for complementary metal-oxide-semiconductor integration and prototype development. Finally, we give an outlook on the future of 2D material sensors, and sketch a roadmap towards realising their industrial and societal impact.
| Original language | English |
|---|---|
| Article number | 023002 |
| Number of pages | 11 |
| Journal | 2D Materials |
| Volume | 12 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2025 |
Keywords
- 2D materials
- sensor
- graphene
- NEMS
- MEMS
- waferscale
- CMOS
Fingerprint
Dive into the research topics of 'Towards wafer-scale 2D material sensors'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver