Towards wafer-scale multilayer graphene mems condenser microphones

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Sarro, P.M., Promotor Steeneken, P.G., Promotor Vollebregt, S., Promotor
Award date	6 Jun 2025
Print ISBNs	978-94-6510-663-2
DOIs	https://doi.org/10.4233/uuid:134c955a-5604-4bfb-bd3f-433be72a04ec
Publication status	Published - 2025

Keywords

Dissertation_RobertoPezone_06_06_2025
Final published version, 17.5 MB
Licence: CC BY
Embargo ends: 6/06/26

@phdthesis{134c955a56044bfbbd3f433be72a04ec,

title = "Towards wafer-scale multilayer graphene mems condenser microphones",

keywords = "graphene, microphone, MEMS, membrane",

author = "R. Pezone",

year = "2025",

doi = "10.4233/uuid:134c955a-5604-4bfb-bd3f-433be72a04ec",

language = "English",

isbn = "978-94-6510-663-2",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}