Trajectory displacement effect in particle projection Lithography systems - Modifications to the Extended Two-Particle Theory and Monte Carlo Simulation Technique

GH Jansen

    Research output: Contribution to journalArticleScientificpeer-review

    38 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)4549-4567
    Number of pages19
    JournalJournal of Applied Physics
    Volume84
    Issue number8
    Publication statusPublished - 1998

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