Trajectory displacement in a multi beam scanning electron microscope

Jan Stopka*, Wilco Zuidema, Pieter Kruit

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review


The analytical theory of statistical Coulomb interactions allows to determine the trajectory displacement in a single rotationally symmetrical beam with well-behaved spatial and angular particle distributions. This can be used to estimate the trajectory displacement in a multi-beam system using the so called fully-filled segment approximation. This approach predicts full compensation of trajectory displacement for a specific setup of the system. We show that this prediction is not consistent with Monte Carlo simulations and we develop a new approach to the calculation, showing that two independent trajectory displacement contributions are present in a multi-beam system. We support this calculation with Monte Carlo simulations as well as with experimental data from a multi-beam system.

Original languageEnglish
Article number113223
Number of pages8
Publication statusPublished - 2021


  • Coulomb interactions
  • Electron optics
  • Multi-beam electron microscope
  • Slice method
  • Trajectory displacement


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