Abstract
The analytical theory of statistical Coulomb interactions allows to determine the trajectory displacement in a single rotationally symmetrical beam with well-behaved spatial and angular particle distributions. This can be used to estimate the trajectory displacement in a multi-beam system using the so called fully-filled segment approximation. This approach predicts full compensation of trajectory displacement for a specific setup of the system. We show that this prediction is not consistent with Monte Carlo simulations and we develop a new approach to the calculation, showing that two independent trajectory displacement contributions are present in a multi-beam system. We support this calculation with Monte Carlo simulations as well as with experimental data from a multi-beam system.
Original language | English |
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Article number | 113223 |
Number of pages | 8 |
Journal | Ultramicroscopy |
Volume | 223 |
DOIs | |
Publication status | Published - 2021 |
Keywords
- Coulomb interactions
- Electron optics
- Multi-beam electron microscope
- Slice method
- Trajectory displacement