Transfer-free graphene-based differential pressure sensor

Raghutham Ramesha; Sten Vollebregt; Pasqualina M. Sarro

doi:10.1109/NMDC47361.2019.9084006

Transfer-free graphene-based differential pressure sensor

Raghutham Ramesha, Sten Vollebregt^*, Pasqualina M. Sarro

^*Corresponding author for this work

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (SciVal)

37 Downloads (Pure)

Abstract

Graphene is an attractive material to be used for pressure sensors due to its thinness, electrical conductivity, and potential high gauge factor. One of the issues with processing graphene is the scalability, which is largely limited by the transfer process that is required for graphene deposited by chemical vapour deposition (CVD). In this work we employed a novel, transfer-free bulk-micromachining approach to realize graphene-based differential pressure sensors. The devices were successfully fabricated, and the samples were examined under Raman Spectroscopy, and electrically characterized. Further, pressure dependent measurements were performed for a dynamic range of 0 to 80 kPa of differential pressure and the corresponding change in resistance of the membrane was measured. The fabricated device has a sensitivity of 0.077 Ω/kPa and a gauge factor of 2.48.

Original language	English
Title of host publication	2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019
Publisher	IEEE
ISBN (Electronic)	9781728126371
DOIs	https://doi.org/10.1109/NMDC47361.2019.9084006
Publication status	Published - 2019
Event	14th IEEE Nanotechnology Materials and Devices Conference, NMDC 2019 - Stockholm, Sweden Duration: 27 Oct 2019 → 30 Oct 2019

Publication series

Name	2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019

Conference

Conference	14th IEEE Nanotechnology Materials and Devices Conference, NMDC 2019
Country/Territory	Sweden
City	Stockholm
Period	27/10/19 → 30/10/19

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Bulk micromachining
Differential pressure sensor
Graphene
Piezo resistance
Raman spectroscopy

Access to Document

10.1109/NMDC47361.2019.9084006

Transfer_free_Graphene_based_Differential_Pressure_SensorFinal published version, 607 KB

Cite this

@inproceedings{875a3f5ce56741acae0368ef7531ce62,

title = "Transfer-free graphene-based differential pressure sensor",

abstract = "Graphene is an attractive material to be used for pressure sensors due to its thinness, electrical conductivity, and potential high gauge factor. One of the issues with processing graphene is the scalability, which is largely limited by the transfer process that is required for graphene deposited by chemical vapour deposition (CVD). In this work we employed a novel, transfer-free bulk-micromachining approach to realize graphene-based differential pressure sensors. The devices were successfully fabricated, and the samples were examined under Raman Spectroscopy, and electrically characterized. Further, pressure dependent measurements were performed for a dynamic range of 0 to 80 kPa of differential pressure and the corresponding change in resistance of the membrane was measured. The fabricated device has a sensitivity of 0.077 Ω/kPa and a gauge factor of 2.48.",

keywords = "Bulk micromachining, Differential pressure sensor, Graphene, Piezo resistance, Raman spectroscopy",

author = "Raghutham Ramesha and Sten Vollebregt and Sarro, {Pasqualina M.}",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. ; 14th IEEE Nanotechnology Materials and Devices Conference, NMDC 2019 ; Conference date: 27-10-2019 Through 30-10-2019",

year = "2019",

doi = "10.1109/NMDC47361.2019.9084006",

language = "English",

series = "2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019",

publisher = "IEEE",

booktitle = "2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019",

address = "United States",

}

Ramesha, R, Vollebregt, S & Sarro, PM 2019, Transfer-free graphene-based differential pressure sensor. in 2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019., 9084006, 2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019, IEEE, 14th IEEE Nanotechnology Materials and Devices Conference, NMDC 2019, Stockholm, Sweden, 27/10/19. https://doi.org/10.1109/NMDC47361.2019.9084006

Transfer-free graphene-based differential pressure sensor. / Ramesha, Raghutham; Vollebregt, Sten ; Sarro, Pasqualina M.
2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019. IEEE, 2019. 9084006 (2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Transfer-free graphene-based differential pressure sensor

AU - Ramesha, Raghutham

AU - Vollebregt, Sten

AU - Sarro, Pasqualina M.

N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2019

Y1 - 2019

N2 - Graphene is an attractive material to be used for pressure sensors due to its thinness, electrical conductivity, and potential high gauge factor. One of the issues with processing graphene is the scalability, which is largely limited by the transfer process that is required for graphene deposited by chemical vapour deposition (CVD). In this work we employed a novel, transfer-free bulk-micromachining approach to realize graphene-based differential pressure sensors. The devices were successfully fabricated, and the samples were examined under Raman Spectroscopy, and electrically characterized. Further, pressure dependent measurements were performed for a dynamic range of 0 to 80 kPa of differential pressure and the corresponding change in resistance of the membrane was measured. The fabricated device has a sensitivity of 0.077 Ω/kPa and a gauge factor of 2.48.

AB - Graphene is an attractive material to be used for pressure sensors due to its thinness, electrical conductivity, and potential high gauge factor. One of the issues with processing graphene is the scalability, which is largely limited by the transfer process that is required for graphene deposited by chemical vapour deposition (CVD). In this work we employed a novel, transfer-free bulk-micromachining approach to realize graphene-based differential pressure sensors. The devices were successfully fabricated, and the samples were examined under Raman Spectroscopy, and electrically characterized. Further, pressure dependent measurements were performed for a dynamic range of 0 to 80 kPa of differential pressure and the corresponding change in resistance of the membrane was measured. The fabricated device has a sensitivity of 0.077 Ω/kPa and a gauge factor of 2.48.

KW - Bulk micromachining

KW - Differential pressure sensor

KW - Graphene

KW - Piezo resistance

KW - Raman spectroscopy

UR - http://www.scopus.com/inward/record.url?scp=85086236485&partnerID=8YFLogxK

U2 - 10.1109/NMDC47361.2019.9084006

DO - 10.1109/NMDC47361.2019.9084006

M3 - Conference contribution

AN - SCOPUS:85086236485

T3 - 2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019

BT - 2019 IEEE 14th Nanotechnology Materials and Devices Conference, NMDC 2019

PB - IEEE

T2 - 14th IEEE Nanotechnology Materials and Devices Conference, NMDC 2019

Y2 - 27 October 2019 through 30 October 2019

ER -

Transfer-free graphene-based differential pressure sensor

Abstract

Publication series

Conference

Bibliographical note

Keywords

Access to Document

Other files and links

Fingerprint

Cite this