Transient Simulations of selective Chemical Vapour Deposition of Tungsten using Phoenics-CVD

    Research output: Contribution to journalArticlepeer-review

    Original languageUndefined/Unknown
    Pages (from-to)391-404
    Number of pages14
    JournalThe PHOENICSJournal of Computational Fluid Dynamics & its Applications
    Volume10
    Issue number4
    Publication statusPublished - 1997

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