Original language | Undefined/Unknown |
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Pages (from-to) | 391-404 |
Number of pages | 14 |
Journal | The PHOENICSJournal of Computational Fluid Dynamics & its Applications |
Volume | 10 |
Issue number | 4 |
Publication status | Published - 1997 |
Transient Simulations of selective Chemical Vapour Deposition of Tungsten using Phoenics-CVD
KJ Kuijlaars, CR Kleijn, HEA van den Akker
Research output: Contribution to journal › Article › Scientific › peer-review