Transient sputtering of silicon by argon studied by molecular dynamics simulations

EFC Haddeman, BJ Thijsse

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	161-167
Number of pages	7
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	202
Publication status	Published - 2003

ISSN-nummer: 0168-583X

Keywords

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title = "Transient sputtering of silicon by argon studied by molecular dynamics simulations",

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AU - Haddeman, EFC

AU - Thijsse, BJ

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JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

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