Transient sputtering of silicon by argon studied by molecular dynamics simulations

EFC Haddeman, BJ Thijsse

    Research output: Contribution to journalArticleScientificpeer-review

    19 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)161-167
    Number of pages7
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume202
    Publication statusPublished - 2003

    Keywords

    • ZX CWTS JFIS < 1.00

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