Transport-based dopant metrology in advanced FinFETs

GP Lansbergen; R Rahman; CJ Wellard; J Caro; N Collaert; S Biesemans; G Klimeck; L.C.L Hollenberg; S Rogge

Transport-based dopant metrology in advanced FinFETs

GP Lansbergen, R Rahman, CJ Wellard, J Caro, N Collaert, S Biesemans, G Klimeck, L.C.L Hollenberg, S Rogge

Data-Intensive Systems

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

6 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008, TECHNICAL DIGEST
Editors	GP Lansbergen
Place of Publication	NEW YORK
Publisher	IEEE Society
Pages	713-716
Number of pages	4
ISBN (Print)	978-1-4244-2377-4
Publication status	Published - 2008
Event	IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008 - NEW YORK Duration: 15 Dec 2008 → 17 Dec 2008

Publication series

Name
Publisher	IEEE

Conference

Conference	IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008
Period	15/12/08 → 17/12/08

Bibliographical note

Nog niet eerder opgevoerd

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{d3403eafd72f4fd6b5bccdb419b5344f,

title = "Transport-based dopant metrology in advanced FinFETs",

keywords = "Conf.proc. > 3 pag",

author = "GP Lansbergen and R Rahman and CJ Wellard and J Caro and N Collaert and S Biesemans and G Klimeck and L.C.L Hollenberg and S Rogge",

note = "Nog niet eerder opgevoerd; IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008 ; Conference date: 15-12-2008 Through 17-12-2008",

year = "2008",

language = "Undefined/Unknown",

isbn = "978-1-4244-2377-4",

publisher = "IEEE Society",

pages = "713--716",

editor = "GP Lansbergen",

booktitle = "IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008, TECHNICAL DIGEST",

}

TY - GEN

T1 - Transport-based dopant metrology in advanced FinFETs

AU - Lansbergen, GP

AU - Rahman, R

AU - Wellard, CJ

AU - Caro, J

AU - Collaert, N

AU - Biesemans, S

AU - Klimeck, G

AU - Hollenberg, L.C.L

AU - Rogge, S

N1 - Nog niet eerder opgevoerd

PY - 2008

Y1 - 2008

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-4244-2377-4

SP - 713

EP - 716

BT - IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008, TECHNICAL DIGEST

A2 - Lansbergen, GP

PB - IEEE Society

CY - NEW YORK

T2 - IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008

Y2 - 15 December 2008 through 17 December 2008

ER -