Trenchfill with SiOF, uniformity of properties of interest over the wafer

DJ de Boer, AJ Kalkman, GCAM Janssen, S Radelaar

    Research output: Book/ReportReportProfessional

    Original languageUndefined/Unknown
    Place of PublicationDelft
    PublisherTechnische Universiteit Delft
    Publication statusPublished - 1997

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    PublisherTechnische Universiteit Delft

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