Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation

F Santagata, JF Creemer, E Iervolino, PM Sarro

Research output: Contribution to journal › Article › Scientific › peer-review

18 Citations (Scopus)

Original language	English
Pages (from-to)	1-8
Number of pages	8
Journal	Journal of Micromechanics and Microengineering
Volume	22
Issue number	10
DOIs	https://doi.org/10.1088/0960-1317/22/10/105025
Publication status	Published - 2012

Harvest

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title = "Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation",

author = "F Santagata and JF Creemer and E Iervolino and PM Sarro",

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T1 - Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation

AU - Santagata, F

AU - Creemer, JF

AU - Iervolino, E

AU - Sarro, PM

N1 - Harvest

PY - 2012

Y1 - 2012

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DO - 10.1088/0960-1317/22/10/105025

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JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

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