Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation

F Santagata, JF Creemer, E Iervolino, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

14 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-8
Number of pages8
JournalJournal of Micromechanics and Microengineering
Volume22
Issue number10
DOIs
Publication statusPublished - 2012

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