Abstract
In recent years, the Q-factor of Si 3 N 4 nanomechanical resonators has significantly been increased by soft-clamping techniques using large and complex support structures. To date, however, obtaining similar performance with smaller supports has remained a challenge. Here, we make use of torsion beam supports to tune the Q-factor of Si 3 N 4 string resonators. By design optimization of the supports, we obtain a 50% Q-factor enhancement compared to the standard clamped-clamped string resonators. By performing experimental and numerical studies, we show that further improvement of the Q-factor is limited by a trade-off between maximizing stress and minimizing torsional support stiffness. Thus, our study also provides insight into dissipation limits of high-stress string resonators and outlines how advanced designs can be realized for reaching ultimate f 0 × Q product while maintaining a small footprint.
Original language | English |
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Article number | 013501 |
Number of pages | 7 |
Journal | Applied Physics Letters |
Volume | 122 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2023 |
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Data and codes underlying the publication: Tuning the Q-factor of Nanomechanical String Resonators by Torsion Support Design
Li, Z. (Creator), Steeneken, P. G. (Creator), Alijani, F. (Creator) & Aragón, A. M. (Creator), TU Delft - 4TU.ResearchData, 12 Nov 2024
DOI: 10.4121/CA47907C-5C20-4C15-8460-1EC0FD9BB11F
Dataset/Software: Dataset