Turbulence and its influence on mass transfer in a rotating disk CVD reactor

H van Santen, CR Kleijn, C van den Akker

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings of the XIV Int. Conference on CVD/EuroCVD11, The Electronical Society
    EditorsMD Allendorf, C Bernard
    Number of pages8
    Publication statusPublished - 1997

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