A fiber optic sensor for two-dimension linear displacement measurements is described. This sensor can have resolution and range in nanometer and millimeter scales, respectively. After validation of the sensor principle in one dimension, the displacement methods in two dimensions are described and the experimental measurements are realized by the use of the sensor and high precision actuators. The best and the worst displacement cases are realized with measured limits of resolution of 27.4 nm and 38.7 nm in the range of 8.67 mm and 13.03 mm, respectively.
|Number of pages||8|
|Journal||Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers|
|Publication status||Published - 2010|
- professional journal papers
- CWTS 0.75 <= JFIS < 2.00