TY - JOUR
T1 - Two-dimension fiber optic sensor for high-resolution and long-range linear measurements
AU - Khiat, A
AU - Lamarque, F
AU - Prelle, C
AU - Pouille, Ph
AU - Leester-Schadel, M
AU - Büttgenbach, S
PY - 2010
Y1 - 2010
N2 - A fiber optic sensor for two-dimension linear displacement measurements is described. This sensor can have resolution and range in nanometer and millimeter scales, respectively. After validation of the sensor principle in one dimension, the displacement methods in two dimensions are described and the experimental measurements are realized by the use of the sensor and high precision actuators. The best and the worst displacement cases are realized with measured limits of resolution of 27.4 nm and 38.7 nm in the range of 8.67 mm and 13.03 mm, respectively.
AB - A fiber optic sensor for two-dimension linear displacement measurements is described. This sensor can have resolution and range in nanometer and millimeter scales, respectively. After validation of the sensor principle in one dimension, the displacement methods in two dimensions are described and the experimental measurements are realized by the use of the sensor and high precision actuators. The best and the worst displacement cases are realized with measured limits of resolution of 27.4 nm and 38.7 nm in the range of 8.67 mm and 13.03 mm, respectively.
KW - professional journal papers
KW - CWTS 0.75 <= JFIS < 2.00
UR - http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6THG-4Y35TH3-6&_user=499885&_coverDate=03%2F31%2F2010&_rdoc=1&_fmt=high&_orig=search&_origin=search&_sort=d&_docanchor=&view=c&_acct=C000024500&_version=1&_urlVersion=0&_userid=499885&md5=1e8c73afa54126c210ef6ede3f802caa&searchtype=a
M3 - Article
SN - 0924-4247
VL - 158
SP - 43
EP - 50
JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
IS - 1
ER -