Abstract
Two novel MEMS actuator systems (a torsional one and a deflecting one) for a new self-aligned integrated 3D optical coherent tomography (OCT) scanner are reported. These new systems, with a footprint of 2.5mm×2.5 mm each, provide a χ and y scanning range of 730 μm (tilting range of 8°) with an average power consumption of 150 mW. As the device integrates a silicon collimating micro lens, an optical waveguide and a MEMS actuator system on a single chip, it provides a considerable decrease in optical losses thanks to the intrinsic alignment obtained during fabrication, while significantly reducing the complexity and time that assembly and packaging of separate components demand, therefore making fully integrated, miniaturized 3D OCT scanners feasible.
Original language | English |
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Title of host publication | MEMS 2017 |
Subtitle of host publication | 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Pages | 797-800 |
Number of pages | 4 |
ISBN (Electronic) | 978-1-5090-5078-9 |
Publication status | Published - 23 Feb 2017 |
Event | MEMS 2017: 30th IEEE International Conference on Micro Electro Mechanical Systems - Rio Las Vegas Hotel and Casino, Las Vegas, NV, United States Duration: 22 Jan 2017 → 26 Jan 2017 Conference number: 30 |
Conference
Conference | MEMS 2017 |
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Abbreviated title | IEEE MEMS 2017 |
Country/Territory | United States |
City | Las Vegas, NV |
Period | 22/01/17 → 26/01/17 |
Keywords
- Fasteners
- Actuators
- Micromechanical devices
- Optical device fabrication
- Silicon
- Optical imaging
- Lenses