Ultra-high aspect ratio FinFet technology

V Jovanovic, T Suligoj, M Poljak, Y Civale, LK Nanver

Research output: Contribution to journalArticleScientificpeer-review

22 Citations (Scopus)
Original languageEnglish
Pages (from-to)870-876
Number of pages7
JournalSolid-State Electronics
Volume54
Issue number9
DOIs
Publication statusPublished - 2010

Keywords

  • CWTS JFIS < 0.75

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