Ultra-high depth resolution analysis with a magnetic-sector SIMS

ZX Jiang, PFA Alkemade

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageUndefined/Unknown
    Pages (from-to)288-293
    Number of pages6
    JournalChinese Journal of Vacuum Science and Technology
    Volume18
    Publication statusPublished - 1998

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