Ultra-high depth resolution RBS and SIMS of the modification of a Ge delta in Si during 2 keV O2+ sputtering

WM Arnoldbik, ZX Jiang, PFA Alkemade, DJ Boerma

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	540-544
Number of pages	5
Journal	Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	136-138
Issue number	1
Publication status	Published - 1998

Cite this

@article{beac62441d4c4adeb686af11c22d76eb,

title = "Ultra-high depth resolution RBS and SIMS of the modification of a Ge delta in Si during 2 keV O2+ sputtering",

author = "WM Arnoldbik and ZX Jiang and PFA Alkemade and DJ Boerma",

year = "1998",

language = "Undefined/Unknown",

volume = "136-138",

pages = "540--544",

journal = "Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

number = "1",

}

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Ultra-high depth resolution RBS and SIMS of the modification of a Ge delta in Si during 2 keV O2+ sputtering

AU - Arnoldbik, WM

AU - Jiang, ZX

AU - Alkemade, PFA

AU - Boerma, DJ

PY - 1998

Y1 - 1998

M3 - Article

SN - 0168-583X

VL - 136-138

SP - 540

EP - 544

JO - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

IS - 1

ER -