Ultra-high depth resolution RBS and SIMS of the modification of a Ge delta in Si during 2 keV O2+ sputtering

WM Arnoldbik, ZX Jiang, PFA Alkemade, DJ Boerma

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)540-544
    Number of pages5
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Issue number1
    Publication statusPublished - 1998

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