Ultra-high depth resolution SIMS with sub-kev grazing O2+ beams

PFA Alkemade, ZX Jiang, CCG Visser, S Radelaar, WM Arnoldbik

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Fourth International Workshop Ultra-Shallow Junctions 1997, Research Triangle
Editors	N Paine
Pages	13.1-13.7
Publication status	Published - 1997

Cite this

@inproceedings{058fd974f8864a07928934e51a7a16a8,

title = "Ultra-high depth resolution SIMS with sub-kev grazing O2+ beams",

author = "PFA Alkemade and ZX Jiang and CCG Visser and S Radelaar and WM Arnoldbik",

year = "1997",

language = "Undefined/Unknown",

pages = "13.1--13.7",

editor = "N Paine",

booktitle = "Fourth International Workshop Ultra-Shallow Junctions 1997, Research Triangle",

}