Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 373-376 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures |
Volume | 16 |
Issue number | 1 |
Publication status | Published - 1998 |
Ultra-high depth resolution with a grazing sub-keV oxygen beam in a magnetic sector SIMS
PFA Alkemade, ZX Jiang, CCG Visser, S Radelaar, WM Arnoldbik
Research output: Contribution to journal › Article › Scientific › peer-review
17
Citations
(Scopus)