Ultra-high depth resolution with a grazing sub-keV oxygen beam in a magnetic sector SIMS

PFA Alkemade, ZX Jiang, CCG Visser, S Radelaar, WM Arnoldbik

    Research output: Contribution to journalArticleScientificpeer-review

    17 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)373-376
    Number of pages4
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume16
    Issue number1
    Publication statusPublished - 1998

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