Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA

P Khosropanah, T. Suzuki, M. L. Ridder, R. A. Hijmering, H. Akamatsu, L Gottardi, J. Van Der Kuur, J. R. Gao, B. D. Jackson

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    18 Citations (Scopus)
    107 Downloads (Pure)

    Abstract

    SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm2 and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10-19 W/√Hz.

    Original languageEnglish
    Title of host publicationProceedings of SPIE
    Subtitle of host publicationMillimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII
    PublisherSPIE
    Number of pages6
    Volume9914
    ISBN (Electronic)978-151060207-6
    DOIs
    Publication statusPublished - 2016
    EventMillimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII - Edinburgh, United Kingdom
    Duration: 28 Jun 20161 Jul 2016

    Conference

    ConferenceMillimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII
    Country/TerritoryUnited Kingdom
    CityEdinburgh
    Period28/06/161/07/16

    Keywords

    • Far infrared spectrometer
    • SAFARI
    • SiN membrane
    • SPICA
    • TES arrays
    • Transition edge sensor

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