Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA

P Khosropanah; T. Suzuki; M. L. Ridder; R. A. Hijmering; H. Akamatsu; L Gottardi; J. Van Der Kuur; J. R. Gao; B. D. Jackson

doi:10.1117/12.2233472

Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA

P Khosropanah, T. Suzuki, M. L. Ridder, R. A. Hijmering, H. Akamatsu, L Gottardi, J. Van Der Kuur, J. R. Gao, B. D. Jackson

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

18 Citations (Scopus)

107 Downloads (Pure)

Abstract

SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm² and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10^-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10^-19 W/√Hz.

Original language	English
Title of host publication	Proceedings of SPIE
Subtitle of host publication	Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII
Publisher	SPIE
Number of pages	6
Volume	9914
ISBN (Electronic)	978-151060207-6
DOIs	https://doi.org/10.1117/12.2233472
Publication status	Published - 2016
Event	Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII - Edinburgh, United Kingdom Duration: 28 Jun 2016 → 1 Jul 2016

Conference

Conference	Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII
Country/Territory	United Kingdom
City	Edinburgh
Period	28/06/16 → 1/07/16

Keywords

Far infrared spectrometer
SAFARI
SiN membrane
SPICA
TES arrays
Transition edge sensor

Access to Document

10.1117/12.2233472

99140BFinal published version, 1.31 MB

Cite this

Khosropanah, P., Suzuki, T., Ridder, M. L., Hijmering, R. A., Akamatsu, H., Gottardi, L., Van Der Kuur, J., Gao, J. R., & Jackson, B. D. (2016). Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA. In Proceedings of SPIE: Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII (Vol. 9914). [99140B] SPIE. https://doi.org/10.1117/12.2233472

@inproceedings{cdefbe12add84762adb1a4ba1941afc1,

title = "Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA",

abstract = "SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm2 and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10-19 W/√Hz.",

keywords = "Far infrared spectrometer, SAFARI, SiN membrane, SPICA, TES arrays, Transition edge sensor",

author = "P Khosropanah and T. Suzuki and Ridder, {M. L.} and Hijmering, {R. A.} and H. Akamatsu and L Gottardi and {Van Der Kuur}, J. and Gao, {J. R.} and Jackson, {B. D.}",

year = "2016",

doi = "10.1117/12.2233472",

language = "English",

volume = "9914",

booktitle = "Proceedings of SPIE",

publisher = "SPIE",

address = "United States",

note = "Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII ; Conference date: 28-06-2016 Through 01-07-2016",

}

Khosropanah, P, Suzuki, T, Ridder, ML, Hijmering, RA, Akamatsu, H, Gottardi, L, Van Der Kuur, J, Gao, JR & Jackson, BD 2016, Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA. in Proceedings of SPIE: Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII. vol. 9914, 99140B, SPIE, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII, Edinburgh, United Kingdom, 28/06/16. https://doi.org/10.1117/12.2233472

Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA. / Khosropanah, P; Suzuki, T.; Ridder, M. L.; Hijmering, R. A.; Akamatsu, H.; Gottardi, L; Van Der Kuur, J.; Gao, J. R.; Jackson, B. D.

Proceedings of SPIE: Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII. Vol. 9914 SPIE, 2016. 99140B.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA

AU - Khosropanah, P

AU - Suzuki, T.

AU - Ridder, M. L.

AU - Hijmering, R. A.

AU - Akamatsu, H.

AU - Gottardi, L

AU - Van Der Kuur, J.

AU - Gao, J. R.

AU - Jackson, B. D.

PY - 2016

Y1 - 2016

N2 - SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm2 and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10-19 W/√Hz.

AB - SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm2 and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10-19 W/√Hz.

KW - Far infrared spectrometer

KW - SAFARI

KW - SiN membrane

KW - SPICA

KW - TES arrays

KW - Transition edge sensor

UR - http://resolver.tudelft.nl/uuid:cdefbe12-add8-4762-adb1-a4ba1941afc1

UR - http://www.scopus.com/inward/record.url?scp=85014994991&partnerID=8YFLogxK

U2 - 10.1117/12.2233472

DO - 10.1117/12.2233472

M3 - Conference contribution

AN - SCOPUS:85014994991

VL - 9914

BT - Proceedings of SPIE

PB - SPIE

T2 - Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII

Y2 - 28 June 2016 through 1 July 2016

ER -

Ultra-low noise TES bolometer arrays for SAFARI instrument on SPICA

Abstract

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this