Abstract
SRON is developing ultra-low noise Transition Edge Sensors (TESs) based on a superconducting Ti/Au bilayer on a suspended SiN island with SiN legs for the SAFARI instrument aboard the SPICA mission. We successfully fabricated TESs with very narrow (0.5-0.7 μm) and thin (0.25 μm) SiN legs on different sizes of SiN islands using deep reactiveion etching process. The pixel size is 840x840 μm2 and there are variety of designs with and without optical absorbers. For TESs without absorbers, we measured electrical NEPs as low as <1x10-19 W/√Hz with response time of 0.3 ms and reached the phonon noise limit. Using TESs with absorbers, we quantified the darkness of our setup and confirmed a photon noise level of 2x10-19 W/√Hz.
Original language | English |
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Title of host publication | Proceedings of SPIE |
Subtitle of host publication | Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII |
Publisher | SPIE |
Number of pages | 6 |
Volume | 9914 |
ISBN (Electronic) | 978-151060207-6 |
DOIs | |
Publication status | Published - 2016 |
Event | Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII - Edinburgh, United Kingdom Duration: 28 Jun 2016 → 1 Jul 2016 |
Conference
Conference | Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy VIII |
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Country/Territory | United Kingdom |
City | Edinburgh |
Period | 28/06/16 → 1/07/16 |
Keywords
- Far infrared spectrometer
- SAFARI
- SiN membrane
- SPICA
- TES arrays
- Transition edge sensor