Ultra-low-temperature process modules for back-wafer-contacted silicon-on-glass RF/microwave technology

LK Nanver, V Gonda, Y Civale, TLM Scholtes, L La Spina, H Schellevis, G Lorito, F Sarubbi, M Popadic, K Buisman, S Milosavljevic, EJG Goudena

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProc. 9th international conference on solid-state and integrated circuit technology
EditorsT.-A. Tang, H Ru, Y Min, A Xia
Place of Publications.l.
PublisherICSICT
Pages1-4
Number of pages4
ISBN (Print)978-1-4244-2186-2
Publication statusPublished - 2008
EventICSICT 2008 - Beijing, China
Duration: 20 Oct 200823 Oct 2008

Publication series

Name
PublisherICSICT

Conference

ConferenceICSICT 2008
CountryChina
CityBeijing
Period20/10/0823/10/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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