Abstract
In this work we demonstrate how a novel single free electron detector 'Timed Photon Counter' (TiPC) may benefit from ultra-thin MgO transmission dynodes (tynodes). These membranes are fabricated through MEMS process technologies, with atomic layer deposition (ALD) as the most apt technique for growing films of good quality, with excellent control over thicknesses and extremely low surface roughness. Large area arrays of ultra-thin (5-25 nm) free-standing MgO membranes are fabricated and characterized to determine the optimal thickness for application of ALD MgO in TiPC. Supremacy of MgO over other materials previously considered, such as SiN, Al2O3, SiC, Si is verified. The exceptional mechanical (low stress in particular, -200 MPa), chemical and electrical properties of MgO make this material a very attractive candidate for numerous MEMS applications, as the MEMS transmission dynodes in the timed photon counter.
| Original language | English |
|---|---|
| Title of host publication | MEMS 2017 |
| Subtitle of host publication | 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems |
| Place of Publication | Piscataway, NJ |
| Publisher | IEEE |
| Pages | 740-743 |
| Number of pages | 4 |
| ISBN (Electronic) | 978-1-5090-5078-9 |
| Publication status | Published - 2017 |
| Event | MEMS 2017: 30th IEEE International Conference on Micro Electro Mechanical Systems - Rio Las Vegas Hotel and Casino, Las Vegas, NV, United States Duration: 22 Jan 2017 → 26 Jan 2017 Conference number: 30 |
Conference
| Conference | MEMS 2017 |
|---|---|
| Abbreviated title | IEEE MEMS 2017 |
| Country/Territory | United States |
| City | Las Vegas, NV |
| Period | 22/01/17 → 26/01/17 |
Keywords
- Films
- Surface treatment
- Silicon
- Substrates
- Micromechanical devices
- Silicon compounds
- Meurement by laser beam