Ultra-thin ALD MGO membranes as mems transmission dynodes in a timed photon counter

Violeta Prodanovic, Hong Wah Chan, Anil U. Mane, Jeffrey W. Elam, Harry van der Graaf, Pasqualina M. Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review


In this work we demonstrate how a novel single free electron detector 'Timed Photon Counter' (TiPC) may benefit from ultra-thin MgO transmission dynodes (tynodes). These membranes are fabricated through MEMS process technologies, with atomic layer deposition (ALD) as the most apt technique for growing films of good quality, with excellent control over thicknesses and extremely low surface roughness. Large area arrays of ultra-thin (5-25 nm) free-standing MgO membranes are fabricated and characterized to determine the optimal thickness for application of ALD MgO in TiPC. Supremacy of MgO over other materials previously considered, such as SiN, Al2O3, SiC, Si is verified. The exceptional mechanical (low stress in particular, -200 MPa), chemical and electrical properties of MgO make this material a very attractive candidate for numerous MEMS applications, as the MEMS transmission dynodes in the timed photon counter.

Original languageEnglish
Title of host publicationMEMS 2017
Subtitle of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems
Place of PublicationPiscataway, NJ
Number of pages4
ISBN (Electronic)978-1-5090-5078-9
Publication statusPublished - 2017
EventMEMS 2017: 30th IEEE International Conference on Micro Electro Mechanical Systems - Rio Las Vegas Hotel and Casino, Las Vegas, NV, United States
Duration: 22 Jan 201726 Jan 2017
Conference number: 30


ConferenceMEMS 2017
Abbreviated titleIEEE MEMS 2017
CountryUnited States
CityLas Vegas, NV


  • Films
  • Surface treatment
  • Silicon
  • Substrates
  • Micromechanical devices
  • Silicon compounds
  • Meurement by laser beam


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