INIS
electrons
100%
membranes
100%
aluminium oxides
100%
silicon nitrides
100%
fabrication
75%
applications
50%
thickness
50%
photons
50%
photomultipliers
25%
films
25%
layers
25%
low pressure
25%
electron detection
25%
chemical vapor deposition
25%
performance
25%
chemical properties
25%
electron emission
25%
mechanical properties
25%
Material Science
Silicon Nitride
100%
Membrane
100%
Aluminum Oxide
100%
Chemical Property
25%
Vapor
25%
Al2O3
25%
Characterization
25%
Engineering
Nitride
100%
Demonstrates
33%
Applicability
33%
Determines
33%
Thin Membrane
33%
Secondary Electrons
33%
Single Electron
33%
Atomic Layer
33%
Process Condition
33%
Fabrication Method
33%
Chemical Engineering
Alumina
100%
Microelectromechanical System
100%
Silicon Nitride
100%