Ultra-thin deformable silicon substrates with lateral segmentation and flexible metal interconnect

T Zoumpoulidis, L WANG, M Bartek, KMB Jansen, LJ Ernst

Research output: Contribution to journalConference articleScientificpeer-review

1 Citation (Scopus)
Original languageUndefined/Unknown
Pages (from-to)103-112
Number of pages10
JournalECS Transactions
Issue number1
Publication statusPublished - 2007


  • Elektrotechniek
  • academic journal papers
  • Vakpubl., Overig wet. > 3 pag

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