Ultra-thin deformable silicon substrates with lateral segmentation and flexible metal interconnect

T Zoumpoulidis, L WANG, M Bartek, KMB Jansen, LJ Ernst

Research output: Contribution to journal › Conference article › Scientific › peer-review

Keywords

@article{c142d7d873ae46b9904aa0bce5177983,

title = "Ultra-thin deformable silicon substrates with lateral segmentation and flexible metal interconnect",

keywords = "Elektrotechniek, academic journal papers, Vakpubl., Overig wet. > 3 pag",

author = "T Zoumpoulidis and L WANG and M Bartek and KMB Jansen and LJ Ernst",

year = "2007",

language = "Undefined/Unknown",

volume = "9",

pages = "103--112",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "1",

}

TY - JOUR

T1 - Ultra-thin deformable silicon substrates with lateral segmentation and flexible metal interconnect

AU - Zoumpoulidis, T

AU - WANG, L

AU - Bartek, M

AU - Jansen, KMB

AU - Ernst, LJ

PY - 2007

Y1 - 2007

KW - Elektrotechniek

KW - academic journal papers

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference article

SN - 1938-5862

VL - 9

SP - 103

EP - 112

JO - ECS Transactions

JF - ECS Transactions

IS - 1

ER -