Ultra thin gate oxides for 0.1 mm hetrojunction CMOS applications by the use of a sacrifical Si layer

R Loo; M Caymax; P Verheyen; T Conard; H Bender; W Vandervorst; N Collaert; KD Meyer; PFA Alkemade; I Szendrö

Ultra thin gate oxides for 0.1 mm hetrojunction CMOS applications by the use of a sacrifical Si layer

R Loo, M Caymax, P Verheyen, T Conard, H Bender, W Vandervorst, N Collaert, KD Meyer, PFA Alkemade, I Szendrö

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	28th European Solid-State Device Research Conference
Editors	YDA Touboul, JP Klein, H Grünbacher
Place of Publication	Chichester, UK
Publisher	Wiley
Pages	608-611
Number of pages	4
ISBN (Print)	1558994522
Publication status	Published - 1998

Publication series

Name
Publisher	Wiley

Cite this

Loo, R., Caymax, M., Verheyen, P., Conard, T., Bender, H., Vandervorst, W., Collaert, N., Meyer, KD., Alkemade, PFA., & Szendrö, I. (1998). Ultra thin gate oxides for 0.1 mm hetrojunction CMOS applications by the use of a sacrifical Si layer. In YDA. Touboul, JP. Klein, & H. Grünbacher (Eds.), 28th European Solid-State Device Research Conference (pp. 608-611). Wiley.

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title = "Ultra thin gate oxides for 0.1 mm hetrojunction CMOS applications by the use of a sacrifical Si layer",

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year = "1998",

language = "Undefined/Unknown",

isbn = "1558994522",

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Ultra thin gate oxides for 0.1 mm hetrojunction CMOS applications by the use of a sacrifical Si layer. / Loo, R; Caymax, M; Verheyen, P et al.
28th European Solid-State Device Research Conference. ed. / YDA Touboul; JP Klein; H Grünbacher. Chichester, UK: Wiley, 1998. p. 608-611.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Ultra thin gate oxides for 0.1 mm hetrojunction CMOS applications by the use of a sacrifical Si layer

AU - Loo, R

AU - Caymax, M

AU - Verheyen, P

AU - Conard, T

AU - Bender, H

AU - Vandervorst, W

AU - Collaert, N

AU - Meyer, KD

AU - Alkemade, PFA

AU - Szendrö, I

PY - 1998

Y1 - 1998

M3 - Conference contribution

SN - 1558994522

SP - 608

EP - 611

BT - 28th European Solid-State Device Research Conference

A2 - Touboul, YDA

A2 - Klein, JP

A2 - Grünbacher, H

PB - Wiley

CY - Chichester, UK

ER -