Ultra thin gate oxides for 0.1 mm hetrojunction CMOS applications by the use of a sacrifical Si layer

R Loo, M Caymax, P Verheyen, T Conard, H Bender, W Vandervorst, N Collaert, KD Meyer, PFA Alkemade, I Szendrö

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    2 Citations (Scopus)
    Original languageUndefined/Unknown
    Title of host publication28th European Solid-State Device Research Conference
    EditorsYDA Touboul, JP Klein, H Grünbacher
    Place of PublicationChichester, UK
    PublisherWiley
    Pages608-611
    Number of pages4
    ISBN (Print)1558994522
    Publication statusPublished - 1998

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    PublisherWiley

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