Ultrahigh throughput plasma processing of free standing silicon nanocrystals with lognormal size distribution

I Dogan, NJ Kramer, RHJ Westermann, K Dohnalova, AHM Smets, MA Verheijen, T Gregorkiewicz, MCM van de Sanden

Research output: Contribution to journalArticleScientificpeer-review

34 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-10
Number of pages10
JournalJournal of Applied Physics
Volume113
Issue number13
DOIs
Publication statusPublished - 2013

Bibliographical note

Harvest
Online 3-4-2013

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