Ultralow-k dielectrics made by supercritical foaming of thin polymer films

B Krause, GH Koops, NFA van der Vegt, M Wessling, M Wubbenhorst, J van Turnhout

    Research output: Contribution to journalArticleScientificpeer-review

    165 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1041-1046
    Number of pages6
    JournalAdvanced Materials
    Volume14
    Publication statusPublished - 2002

    Keywords

    • ZX CWTS JFIS >= 3.00

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