@inproceedings{2921f4b7bce446e299e5932018603d1b,
title = "Ultrashallow junction silicon photodiodes for detection of low energy electrons",
keywords = "Conf.proc. > 3 pag",
author = "A Sakic and LK Nanver and TLM Scholtes and CTH Heerkens and {van Veen}, G and K Kooijman and P. Vogelsang",
year = "2010",
language = "English",
publisher = "STW",
pages = "150--153",
editor = "{French et al}, P",
booktitle = "Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010",
note = "13th SAFE Workshop STW.ICT Conference 2010 ; Conference date: 18-11-2010 Through 19-11-2010",
}