Ultrasound Imaging with Pre-charged Collapse-Mode CMUTs

Shinnosuke Kawasaki; Marta Saccher; Willem-Jan  de Wijs; Jeroen van den Brand; Ronald Dekker

doi:10.1109/IUS51837.2023.10307216

Ultrasound Imaging with Pre-charged Collapse-Mode CMUTs

Shinnosuke Kawasaki, Marta Saccher, Willem-Jan de Wijs, Jeroen van den Brand, Ronald Dekker

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

Capacitive micromachined ultrasonic transducers (CMUTs) with a built-in charge layer are known as a pre-charged CMUT. In our prior work, we have shown how to model and characterize the charges inside the pre-charged collapse-mode CMUT and conducted life-time test that showed that the charges trapped inside the dielectric were stable in the order of years [1]. However, our prior work focused on the use of pre-charged collapse-mode CMUTs as a way to achieve ultrasound power reception, which does not require the CMUT to be actively driven. In this work, for the first time we use pre-charged collapse-mode CMUTs with an Al2O3 charge-trapping layer to create a B-mode ultrasound image. Thus, this work shows the first example that pre-charged collapse-mode CMUTs can fully operate with only an AC voltage.

Original language	English
Title of host publication	Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS)
Place of Publication	Piscataway
Publisher	IEEE
Number of pages	4
ISBN (Electronic)	979-8-3503-4645-9
ISBN (Print)	979-8-3503-4646-6
DOIs	https://doi.org/10.1109/IUS51837.2023.10307216
Publication status	Published - 2023
Event	2023 IEEE International Ultrasonics Symposium (IUS) - Montreal, Canada Duration: 3 Sept 2023 → 8 Sept 2023

Conference

Conference	2023 IEEE International Ultrasonics Symposium (IUS)
Abbreviated title	IUS 2023
Country/Territory	Canada
City	Montreal
Period	3/09/23 → 8/09/23

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

CMUT
pre-charged CMUT
wearable ultrasound

Access to Document

10.1109/IUS51837.2023.10307216

Ultrasound_Imaging_with_Pre-charged_Collapse-Mode_CMUTsFinal published version, 1.09 MB

Cite this

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title = "Ultrasound Imaging with Pre-charged Collapse-Mode CMUTs",

abstract = "Capacitive micromachined ultrasonic transducers (CMUTs) with a built-in charge layer are known as a pre-charged CMUT. In our prior work, we have shown how to model and characterize the charges inside the pre-charged collapse-mode CMUT and conducted life-time test that showed that the charges trapped inside the dielectric were stable in the order of years [1]. However, our prior work focused on the use of pre-charged collapse-mode CMUTs as a way to achieve ultrasound power reception, which does not require the CMUT to be actively driven. In this work, for the first time we use pre-charged collapse-mode CMUTs with an Al2O3 charge-trapping layer to create a B-mode ultrasound image. Thus, this work shows the first example that pre-charged collapse-mode CMUTs can fully operate with only an AC voltage.",

keywords = "CMUT, pre-charged CMUT, wearable ultrasound",

author = "Shinnosuke Kawasaki and Marta Saccher and {de Wijs}, Willem-Jan and {van den Brand}, Jeroen and Ronald Dekker",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; 2023 IEEE International Ultrasonics Symposium (IUS), IUS 2023 ; Conference date: 03-09-2023 Through 08-09-2023",

year = "2023",

doi = "10.1109/IUS51837.2023.10307216",

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AU - Saccher, Marta

AU - de Wijs, Willem-Jan

AU - van den Brand, Jeroen

AU - Dekker, Ronald

N1 - Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2023

Y1 - 2023

N2 - Capacitive micromachined ultrasonic transducers (CMUTs) with a built-in charge layer are known as a pre-charged CMUT. In our prior work, we have shown how to model and characterize the charges inside the pre-charged collapse-mode CMUT and conducted life-time test that showed that the charges trapped inside the dielectric were stable in the order of years [1]. However, our prior work focused on the use of pre-charged collapse-mode CMUTs as a way to achieve ultrasound power reception, which does not require the CMUT to be actively driven. In this work, for the first time we use pre-charged collapse-mode CMUTs with an Al2O3 charge-trapping layer to create a B-mode ultrasound image. Thus, this work shows the first example that pre-charged collapse-mode CMUTs can fully operate with only an AC voltage.

AB - Capacitive micromachined ultrasonic transducers (CMUTs) with a built-in charge layer are known as a pre-charged CMUT. In our prior work, we have shown how to model and characterize the charges inside the pre-charged collapse-mode CMUT and conducted life-time test that showed that the charges trapped inside the dielectric were stable in the order of years [1]. However, our prior work focused on the use of pre-charged collapse-mode CMUTs as a way to achieve ultrasound power reception, which does not require the CMUT to be actively driven. In this work, for the first time we use pre-charged collapse-mode CMUTs with an Al2O3 charge-trapping layer to create a B-mode ultrasound image. Thus, this work shows the first example that pre-charged collapse-mode CMUTs can fully operate with only an AC voltage.

KW - CMUT

KW - pre-charged CMUT

KW - wearable ultrasound

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DO - 10.1109/IUS51837.2023.10307216

M3 - Conference contribution

SN - 979-8-3503-4646-6

BT - Proceedings of the 2023 IEEE International Ultrasonics Symposium (IUS)

PB - IEEE

CY - Piscataway

T2 - 2023 IEEE International Ultrasonics Symposium (IUS)

Y2 - 3 September 2023 through 8 September 2023

ER -

Ultrasound Imaging with Pre-charged Collapse-Mode CMUTs

Abstract

Conference

Bibliographical note

Keywords

Access to Document

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Pre-Charged Collapse-Mode CMUTs: A building block for future ultrasound

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