Ultrathin complex oxide nanomechanical resonators

D. Davidovikj, D. J. Groenendijk, A. M.R.V.L. Monteiro, A. Dijkhoff, D. Afanasiev, M. Šiškins, H. S.J. van der Zant, A. D. Caviglia*, P. G. Steeneken, More Authors

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

16 Citations (Scopus)
21 Downloads (Pure)


Complex oxide thin films and heterostructures exhibit a variety of electronic phases, often controlled by the mechanical coupling between film and substrate. Recently it has become possible to isolate epitaxially grown single-crystalline layers of these materials, enabling the study of their properties in the absence of interface effects. In this work, we use this technique to create nanomechanical resonators made out of SrTiO3 and SrRuO3. Using laser interferometry, we successfully actuate and measure the motion of the nanodrum resonators. By measuring the temperature-dependent mechanical response of the SrTiO3 resonators, we observe signatures of a structural phase transition, which affects both the strain and mechanical dissipation in the resonators. Here, we demonstrate the feasibility of integrating ultrathin complex oxide membranes for realizing nanoelectromechanical systems on arbitrary substrates and present a novel method of detecting structural phase transitions in these exotic materials.

Original languageEnglish
Article number163
Number of pages6
Issue number1
Publication statusPublished - 2020


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