@inproceedings{458181a8b56847c094c119a4b0da8176,
title = "Uniformity of Chemical Vapor Deposited Boron-Silicide Layers on Silicon",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "F Sarubbi and LK Nanver and TLM Scholtes",
year = "2006",
language = "Undefined/Unknown",
isbn = "90-73461-44-8",
publisher = "s.l.",
pages = "479--482",
editor = "s.n.",
booktitle = "Proceedings of 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors",
note = "9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors ; Conference date: 23-11-2006 Through 24-11-2006",
}