Unifying Ga-As and Si epitaxial growth in a standard Si/SiGe CVD system

A Sammak, WB De Boer, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Proceedings of the 13th SAFE workshop of the SWT.ICT Conference 2010
Editors	P French et al
Place of Publication	Utrecht, The Netherlands
Publisher	STW
Pages	147-154
Number of pages	8
Publication status	Published - 2010
Event	13th SAFE workshop of the SWT.ICT Conference 2010, Veldhoven, the Netherlands - Utrecht, The Netherlands Duration: 18 Nov 2010 → 19 Nov 2010

Name
Publisher	STW

Conference	13th SAFE workshop of the SWT.ICT Conference 2010, Veldhoven, the Netherlands
Period	18/11/10 → 19/11/10

Keywords

@inproceedings{759fe15517df482db138ff9ac022c70a,

title = "Unifying Ga-As and Si epitaxial growth in a standard Si/SiGe CVD system",

keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",

author = "A Sammak and {De Boer}, WB and LK Nanver",

year = "2010",

language = "English",

publisher = "STW",

pages = "147--154",

editor = "{French et al}, P",

booktitle = "Proceedings of the 13th SAFE workshop of the SWT.ICT Conference 2010",

note = "13th SAFE workshop of the SWT.ICT Conference 2010, Veldhoven, the Netherlands ; Conference date: 18-11-2010 Through 19-11-2010",

}

Unifying Ga-As and Si epitaxial growth in a standard Si/SiGe CVD system. / Sammak, A; De Boer, WB; Nanver, LK.
Proceedings of the 13th SAFE workshop of the SWT.ICT Conference 2010. ed. / P French et al. Utrecht, The Netherlands: STW, 2010. p. 147-154.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Unifying Ga-As and Si epitaxial growth in a standard Si/SiGe CVD system

AU - Sammak, A

AU - De Boer, WB

AU - Nanver, LK

PY - 2010

Y1 - 2010

KW - Elektrotechniek

KW - Techniek

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 147

EP - 154

BT - Proceedings of the 13th SAFE workshop of the SWT.ICT Conference 2010

A2 - French et al, P

PB - STW

CY - Utrecht, The Netherlands

T2 - 13th SAFE workshop of the SWT.ICT Conference 2010, Veldhoven, the Netherlands

Y2 - 18 November 2010 through 19 November 2010

ER -