Using deformable surface for thin substrate transport and positioning system: Initial design and preliminary results

HP Vuong, RAJ van Ostayen, RH Munnig Schmidt

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings 14th International Conference of the European Society for Precision Engineering and Technology
EditorsR Leach
Place of PublicationCranfield Univ., UK
PublisherEUSPEN
Pages283-286
Number of pages4
ISBN (Print)978-0-9566790-3-1
Publication statusPublished - 2014
EventEUSPEN 2014, Dubrovnik, Croatia - Cranfield, UK
Duration: 2 Jun 20146 Jun 2014

Publication series

Name
PublisherEuspen

Conference

ConferenceEUSPEN 2014, Dubrovnik, Croatia
Period2/06/146/06/14

Bibliographical note

NEO
Volume 2
ISBN onbekend

Keywords

  • Conf.proc. > 3 pag

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