Using deformable surface for thin substrate transport and positioning system: Initial design and preliminary results

HP Vuong, RAJ van Ostayen, RH Munnig Schmidt

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings 14th International Conference of the European Society for Precision Engineering and Technology
EditorsR Leach
Place of PublicationCranfield Univ., UK
PublisherEUSPEN
Pages283-286
Number of pages4
ISBN (Print)978-0-9566790-3-1
Publication statusPublished - 2014
EventEUSPEN 2014, Dubrovnik, Croatia - Cranfield, UK
Duration: 2 Jun 20146 Jun 2014

Publication series

Name
PublisherEuspen

Conference

ConferenceEUSPEN 2014, Dubrovnik, Croatia
Period2/06/146/06/14

Keywords

  • Conf.proc. > 3 pag

Cite this

Vuong, HP., van Ostayen, RAJ., & Munnig Schmidt, RH. (2014). Using deformable surface for thin substrate transport and positioning system: Initial design and preliminary results. In R. Leach (Ed.), Proceedings 14th International Conference of the European Society for Precision Engineering and Technology (pp. 283-286). EUSPEN.