UV-Laser cutting for silicon MEMS prototyping: Improving etching rate and quality

M. D'Auria, N. Tolou

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology
EditorsR Leach
Place of PublicationCranfield, UK
PublisherEUSPEN
Pages275-279
Number of pages5
Volume2
ISBN (Electronic)9780956679031
Publication statusPublished - 2014
Event14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014 - Dubrovnik, Croatia
Duration: 2 Jun 20146 Jun 2014

Conference

Conference14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014
CountryCroatia
CityDubrovnik
Period2/06/146/06/14

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