@inproceedings{59ede4cf3e8e467784ebdd6d77ed2547,
title = "UV-Laser cutting for silicon MEMS prototyping: Improving etching rate and quality",
author = "M. D'Auria and N. Tolou",
year = "2014",
language = "English",
volume = "2",
pages = "275--279",
editor = "R Leach",
booktitle = "Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology",
publisher = "EUSPEN",
note = "14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014 ; Conference date: 02-06-2014 Through 06-06-2014",
}