Vacuum assisted liquified metal (VALM) TSV filling method with superconductive material

J.A. Alfaro, P.M. Sberna, C. Silvestri, M. Mastrangeli, R. Ishihara, P.M. Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

7 Citations (Scopus)
141 Downloads (Pure)

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Material Science

Engineering

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Physics