@inproceedings{a60d5606c9034e4db2ea3ec0f80321bc,
title = "Vapour HF release of airgap-based UV-visible optical filters",
author = "M Ghaderi and NP Ayerden and {de Graaf}, G and RF Wolffenbuttel",
note = "Harvest Special issue: Eurosensors 2015; 1st YAWL symposium 2013, Sankt Augustin, Germany ; Conference date: 07-06-2013 Through 07-06-2013",
year = "2015",
doi = "10.1016/j.proeng.2015.08.674",
language = "English",
publisher = "Elsevier",
pages = "816--819",
editor = "G Urban and J W{\"o}llenstein and J Kieninger",
booktitle = "Proceedings of the 1st YAWL symposium 2013",
}