@inproceedings{de9d0dc079e14bfc8e0647ed140d7f7e,
title = "Versatile n-type profile engineering by controlling arsenic surface segregation in silicon RPCVD",
keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",
author = "M Popadic and F Sarubbi and TLM Scholtes and LK Nanver",
year = "2006",
language = "Undefined/Unknown",
isbn = "1-56677-512-4",
publisher = "Electrochemical Society",
pages = "393--399",
editor = "s.n",
booktitle = "ECS Transactions",
note = "21st International Symposium on Microelectronics Technology and Devices ; Conference date: 28-08-2006 Through 01-09-2006",
}