Versatile silicon photodiode detector technology for scanning electron microscopy with high-efficiency sub-5 keV electron detection

A Sakic, LK Nanver, G van Veen, K Kooijman, P. Vogelsang, TLM Scholtes, WB De Boer, WHA Wien, S Milosavljevic, CTH Heerkens, T Knezevic, I Spee

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

16 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings 2010 IEEE International Electron Devices Meeting (IEDM)
Editors S.N.
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages1-4
Number of pages4
Publication statusPublished - 2010
EventInternational Electron Devices Meeting 2010, San Francisco, CA, USA - Piscataway, NJ, USA
Duration: 6 Dec 20108 Dec 2010

Publication series

Name
PublisherIEEE

Conference

ConferenceInternational Electron Devices Meeting 2010, San Francisco, CA, USA
Period6/12/108/12/10

Keywords

  • Conf.proc. > 3 pag

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