@inproceedings{38c40ec601be4eb3b95df7e340434b00,
title = "Versatile tool for characterising long term stability and reliability of micromechanical structures",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "R Kazinczi and JR Mollinger and A Bossche",
year = "1999",
language = "Undefined/Unknown",
isbn = "90-76699-02-X",
publisher = "Delft University of Technology",
pages = "1--5",
editor = "{M Bartek}",
booktitle = "Eurosensors XIII: proceedings [CD-ROM]",
address = "Netherlands",
note = "13th European Conference on Solid-State Transducers, The Hague ; Conference date: 12-09-1999 Through 15-09-1999",
}