Versatile tool for characterising long term stability and reliability of micromechanical structures

R Kazinczi, JR Mollinger, A Bossche

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationEurosensors XIII: proceedings [CD-ROM]
Editors M Bartek
Place of PublicationDelft
PublisherDelft University of Technology
Pages1-5
Number of pages5
ISBN (Print)90-76699-02-X
Publication statusPublished - 1999
Event13th European Conference on Solid-State Transducers, The Hague - Delft
Duration: 12 Sep 199915 Sep 1999

Publication series

Name
PublisherDelft University of Technology

Conference

Conference13th European Conference on Solid-State Transducers, The Hague
Period12/09/9915/09/99

Keywords

  • ZX Int.klas.verslagjaar < 2002

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