@article{31e23fcaaf4846aca795fe504bf11dc9,
title = "Versatile tool for characterising long-term stability and reliabity of micromechanical structures",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "R Kazinczi and JR Mollinger and A Bossche",
year = "2000",
language = "Undefined/Unknown",
volume = "85",
pages = "84--89",
journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",
issn = "0924-4247",
publisher = "Elsevier",
number = "1-3",
}