Versatile wire configuration for independent actuation of bending and torsion displacements of microcantilevers

WJ Venstra, M van der Velden, JW Spronck, J van Eijk, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationIEEE Sensors 2005
Editors Vladimir Lumelsky
Place of PublicationIrvine, California, USA
Publishers.l.
Pages584-587
Number of pages4
ISBN (Print)0-7803-9057-1
Publication statusPublished - 2005
EventIEEE Sensors 2005 - Irvine, California, USA
Duration: 31 Oct 20053 Nov 2005

Publication series

Name
Publishers.l.

Conference

ConferenceIEEE Sensors 2005
Period31/10/053/11/05

Bibliographical note

neo

Keywords

  • Conf.proc. > 3 pag

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