Versatile wire configuration for independent actuation of bending and torsion displacements of microcantilevers

WJ Venstra, M van der Velden, JW Spronck, J van Eijk

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationIEEE sensors 2005
Editors sn
Place of PublicationIrvine
PublisherIEEE Society
Pages583-587
Number of pages5
Publication statusPublished - 2006

Publication series

Name
PublisherIEEE

Keywords

  • Conf.proc. > 3 pag

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