Vertically tapered layers for optical applications fabricated using resist reflow

A Emadi, HW Wu, S Grabarnik, G de Graaf, RF Wolffenbuttel

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	074014(1)-074014(9)
Journal	Journal of Micromechanics and Microengineering
Volume	19
Publication status	Published - 2009

Keywords

@article{d8b733ad710548ba9654821002d042c1,

title = "Vertically tapered layers for optical applications fabricated using resist reflow",

keywords = "professional journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "A Emadi and HW Wu and S Grabarnik and {de Graaf}, G and RF Wolffenbuttel",

year = "2009",

language = "Undefined/Unknown",

volume = "19",

pages = "074014(1)--074014(9)",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

}

TY - JOUR

T1 - Vertically tapered layers for optical applications fabricated using resist reflow

AU - Emadi, A

AU - Wu, HW

AU - Grabarnik, S

AU - de Graaf, G

AU - Wolffenbuttel, RF

PY - 2009

Y1 - 2009

KW - professional journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0960-1317

VL - 19

SP - 074014(1)-074014(9)

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -