Vertically tapered layers for optical applications fabricated using resist reflow

A Emadi, HW Wu, S Grabarnik, G de Graaf, RF Wolffenbuttel

Research output: Contribution to journalArticleScientificpeer-review

42 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)074014(1)-074014(9)
JournalJournal of Micromechanics and Microengineering
Volume19
Publication statusPublished - 2009

Keywords

  • professional journal papers
  • CWTS 0.75 <= JFIS < 2.00

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